JPS6049629U - フォトマスクプレ−ト・ホルダ - Google Patents

フォトマスクプレ−ト・ホルダ

Info

Publication number
JPS6049629U
JPS6049629U JP14128183U JP14128183U JPS6049629U JP S6049629 U JPS6049629 U JP S6049629U JP 14128183 U JP14128183 U JP 14128183U JP 14128183 U JP14128183 U JP 14128183U JP S6049629 U JPS6049629 U JP S6049629U
Authority
JP
Japan
Prior art keywords
photomask plate
plate
photomask
plate holder
movers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14128183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6325734Y2 (en]
Inventor
上原　朗
敏夫 宮川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP14128183U priority Critical patent/JPS6049629U/ja
Publication of JPS6049629U publication Critical patent/JPS6049629U/ja
Application granted granted Critical
Publication of JPS6325734Y2 publication Critical patent/JPS6325734Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP14128183U 1983-09-12 1983-09-12 フォトマスクプレ−ト・ホルダ Granted JPS6049629U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14128183U JPS6049629U (ja) 1983-09-12 1983-09-12 フォトマスクプレ−ト・ホルダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14128183U JPS6049629U (ja) 1983-09-12 1983-09-12 フォトマスクプレ−ト・ホルダ

Publications (2)

Publication Number Publication Date
JPS6049629U true JPS6049629U (ja) 1985-04-08
JPS6325734Y2 JPS6325734Y2 (en]) 1988-07-13

Family

ID=30316033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14128183U Granted JPS6049629U (ja) 1983-09-12 1983-09-12 フォトマスクプレ−ト・ホルダ

Country Status (1)

Country Link
JP (1) JPS6049629U (en])

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6433927A (en) * 1987-07-30 1989-02-03 Canon Kk Mask holder and mask conveying method using the same
JPH1097985A (ja) * 1996-09-24 1998-04-14 Canon Inc 走査型露光装置およびデバイス製造方法
JP2004328014A (ja) * 2004-08-10 2004-11-18 Nikon Corp 投影露光装置、及び該投影露光装置を用いたパターン形成方法
KR100965769B1 (ko) 2006-07-31 2010-06-24 가부시키가이샤 다이후쿠 짐 위치 결정 장치
CN106356320A (zh) * 2015-07-15 2017-01-25 苏斯微技术光刻有限公司 用于晶圆照射单元的间隔器移位装置与晶圆照射单元

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4521821Y1 (en]) * 1966-05-10 1970-08-29
JPS5548942A (en) * 1978-10-04 1980-04-08 Hitachi Ltd Positioning device for very small components

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4521821Y1 (en]) * 1966-05-10 1970-08-29
JPS5548942A (en) * 1978-10-04 1980-04-08 Hitachi Ltd Positioning device for very small components

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6433927A (en) * 1987-07-30 1989-02-03 Canon Kk Mask holder and mask conveying method using the same
JPH1097985A (ja) * 1996-09-24 1998-04-14 Canon Inc 走査型露光装置およびデバイス製造方法
JP2004328014A (ja) * 2004-08-10 2004-11-18 Nikon Corp 投影露光装置、及び該投影露光装置を用いたパターン形成方法
KR100965769B1 (ko) 2006-07-31 2010-06-24 가부시키가이샤 다이후쿠 짐 위치 결정 장치
CN106356320A (zh) * 2015-07-15 2017-01-25 苏斯微技术光刻有限公司 用于晶圆照射单元的间隔器移位装置与晶圆照射单元
JP2017027028A (ja) * 2015-07-15 2017-02-02 ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツングＳｕｓｓ ＭｉｃｒｏＴｅｃ Ｌｉｔｈｏｇｒａｐｈｙ ＧｍｂＨ ウエハ照明ユニット用スペーサー変位装置、及びウエハ照明ユニット
CN106356320B (zh) * 2015-07-15 2021-08-10 苏斯微技术光刻有限公司 用于晶圆照射单元的间隔器移位装置与晶圆照射单元

Also Published As

Publication number Publication date
JPS6325734Y2 (en]) 1988-07-13

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